US 7,514,848 B2
Piezoelectric stack and production method of piezoelectric stack
Yoichi Kobane, Kuwana (Japan); Akira Fujii, Yokkaichi (Japan); Hideo Kamiya, Nagoya (Japan); and Hiroaki Makino, Aichi (Japan)
Assigned to Denso Corporation, Kariya, Aichi-Pref. (Japan); and Toyota Jidosha Kabushiki Kaisha, Toyota-Shi, Aichi-Ken (Japan)
Filed on Feb. 17, 2005, as Appl. No. 11/59,635.
Claims priority of application No. 2004-040441 (JP), filed on Feb. 17, 2004.
Prior Publication US 2005/0206274 A1, Sep. 22, 2005
Int. Cl. H01L 41/08 (2006.01)
U.S. Cl. 310—328  [310/365; 310/366] 4 Claims
OG exemplary drawing
 
1. A piezoelectric stack obtained by alternately stacking a piezoelectric layer comprising PZT (lead titanate zirconate) and an internal electrode layer,
wherein the grain boundary-filling factor of a Pb-based glass in the crystal grain boundary of said piezoelectric layer is 95% or more over the whole crystal grain boundary of the piezoelectric layer.