US 7,514,739 B2
Nonvolatile semiconductor device and method of fabricating the same
Young-Sam Park, Suwon-si (Korea, Republic of); Seung-Beom Yoon, Suwon-si (Korea, Republic of); Jeong-Uk Han, Suwon-si (Korea, Republic of); Sung-Taeg Kang, Seoul (Korea, Republic of); and Seung-Jin Yang, Seoul (Korea, Republic of)
Assigned to Samsung Electronics Co., Ltd, Suwon-Si (Korea, Republic of)
Filed on Mar. 19, 2007, as Appl. No. 11/687,942.
Application 11/687942 is a continuation in part of application No. 11/214247, filed on Aug. 29, 2005, granted, now 7,411,243.
Claims priority of provisional application 60/605253, filed on Aug. 27, 2004.
Claims priority of application No. 10-2004-72189 (KR), filed on Sep. 09, 2004.
Prior Publication US 2007/0164344 A1, Jul. 19, 2007
Int. Cl. H01L 29/76 (2006.01); H01L 29/788 (2006.01)
U.S. Cl. 257—315  [257/317; 257/E29.129; 257/E29.3] 8 Claims
OG exemplary drawing
 
1. A stack-type nonvolatile semiconductor device comprising:
a) a first memory device formed on a substrate, the device including:
a semiconductor body elongated in one direction on the substrate, and having a cross section perpendicular to a main surface of the substrate and to the elongated direction, the cross section having a predetermined curvature;
a channel region partially formed on the semiconductor body along the circumference of the semiconductor body;
a tunneling insulating layer disposed on the channel region;
a floating gate disposed on the tunneling insulating layer and electrically insulated from the channel region;
a high dielectric constant material layer disposed on the floating gate;
a metallic control gate disposed on the high dielectric constant material layer and electrically insulated from the floating gate; and
source and drain regions which are adjacent to sides of the metallic control gate and formed on the semiconductor body;
an inter-insulating layer disposed on the first memory device; and
a conductive layer disposed on the inter-insulating layer; and
b) a second memory device formed on the conductive layer, the device including:
a semiconductor body elongated in one direction on the conductive layer, and having a cross section perpendicular to a main surface of the conductive layer and to the elongated direction, the cross section having a predetermined curvature;
a channel region partially formed on the semiconductor body along the circumference of the semiconductor body;
a tunneling insulating layer disposed on the channel region;
a floating gate disposed on the tunneling insulating layer and electrically insulated from the channel region;
a high dielectric constant material layer disposed on the floating gate;
a metallic control gate disposed on the high dielectric constant material layer and electrically insulated from the floating gate; and
source and drain regions that are adjacent to sides of the metallic control gate and formed on the semiconductor body.