| US 7,513,262 B2 | ||
| Substrate meniscus interface and methods for operation | ||
| Carl Woods, Aptos, Calif. (US) | ||
| Assigned to Lam Research Corporation, Fremont, Calif. (US) | ||
| Filed on Apr. 01, 2004, as Appl. No. 10/817,620. | ||
| Application 10/817620 is a continuation in part of application No. 10/261839, filed on Sep. 30, 2002, granted, now 7,234,477. | ||
| Prior Publication US 2005/0145268 A1, Jul. 07, 2005 | ||
| Int. Cl. B08B 3/00 (2006.01) | ||
| U.S. Cl. 134—83 [134/95.2; 134/198; 134/902] | 19 Claims |
| 1. An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate, comprising:
a docking surface configured to be oriented adjacent to and beside an edge of the substrate, the docking surface being coplanar
with the substrate, and providing a transition interface to allow the fluid meniscus to enter and exit the surface of the
substrate, the transition interface being spaced apart from the substrate;
a coupon magazine for holding the docking surface at one side and having a second side extend out to define the transition
interface; and
at least one proximity head that forms the fluid meniscus.
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