| US 7,513,063 B2 | ||
| Substrate processing apparatus | ||
| Yasumi Sago, Tachikawa (Japan); Masayoshi Ikeda, Hachioji (Japan); Kazuaki Kaneko, Tokyo (Japan); and Takuji Okada, Tachikawa (Japan) | ||
| Assigned to Canon Anelva Corporation, Kanagawa (Japan) | ||
| Filed on Feb. 28, 2003, as Appl. No. 10/375,349. | ||
| Claims priority of application No. 2002-054863 (JP), filed on Feb. 28, 2002. | ||
| Prior Publication US 2003/0159307 A1, Aug. 28, 2003 | ||
| Int. Cl. F26B 17/00 (2006.01) | ||
| U.S. Cl. 34—578 [165/185] | 16 Claims |
| 1. A substrate processing apparatus comprising a substrate holder for holding a substrate and a gas emitting device arranged
to face said substrate holder in a process chamber equipped with a gas introduction device connected to said gas emitting
device and an exhaust device, to process a substrate with a gas emitted from said gas emitting device toward the substrate
or its reaction product,
wherein at least one of said substrate holder and said gas emitting device has a heat exchanger, comprising,
a first plate,
a second plate facing said first plate,
a fluid channel wall having no end, the fluid channel wall arranged between said first plate and said second plate to form
a fluid channel for a fluid,
an introduction port for introducing said fluid into said fluid channel,
a discharge port for discharging said fluid from said fluid channel,
a discontinuous first fin having a plurality of substantially aligned first fin segments extending in an arcuate shape, a
gap of a first length extending between adjacent ones of the first fin segments, said discontinuous first fin being disposed
on said first plate and inside said fluid channel along said fluid channel, and a height of the discontinuous first fin being
less than the distance between said two plates; and
a discontinuous second fin having a plurality of substantially aligned second fin segments extending in an arcuate shape,
a gap of a second length extending between adjacent ones of the second fin segments, said discontinuous second fin being disposed
on said second plate and inside said fluid channel along said fluid channel, and a height of said discontinuous second fin
being less than the distance between said two plates,
wherein said discharge port is formed in one of the gaps.
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