| US 7,353,379 B2 | ||
| Methods for configuring a plasma cluster tool | ||
| Chung-Ho Huang, San Jose, Calif. (US); Shih-Jeun Fan, San Jose, Calif. (US); and Chin-Chuan Chang, Los Altos, Calif. (US) | ||
| Assigned to Lam Research Corporation, Fremont, Calif. (US) | ||
| Filed on Mar. 31, 2005, as Appl. No. 11/97,839. | ||
| Claims priority of provisional application 60/656862, filed on Feb. 25, 2005. | ||
| Prior Publication US 2006/0206223 A1, Sep. 14, 2006 | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. G06F 15/177 (2006.01) | ||
| U.S. Cl. 713—100 [713/1; 713/2; 204/298.01; 438/5; 438/8; 438/907; 438/908; 118/696; 118/702; 700/90; 700/95; 700/96; 700/100] | 20 Claims |
| 1. A method for configuring a plasma cluster tool, comprising:
generating a key file from option specifications;
installing said key file on hardware of said plasma cluster tool;
generating at least one system-wide configuration file and at least one component-level configuration file using said key
file, said key file encapsulating configuration restrictions specifically imposed on said plasma cluster tool;
generating run-time executable objects from a database of -option definition files, said at least one system-wide configuration
file, and said at least one component-level configuration file; and
employing said run-time executable objects to configure at least hardware of at least a component of said plasma cluster tool.
|