US 7,352,892 B2
System and method for shape reconstruction from optical images
Xuemei Zhang, Mountain View, Calif. (US); Ramakrishna Kakarala, Santa Clara, Calif. (US); and Izhak Baharav, San Jose, Calif. (US)
Assigned to Micron Technology, Inc., Boise, Id. (US)
Filed on Mar. 20, 2003, as Appl. No. 10/392,948.
Prior Publication US 2004/0184648 A1, Sep. 23, 2004
Int. Cl. G06K 9/00 (2006.01)
U.S. Cl. 382—154  [382/144; 382/145; 345/419; 356/12] 24 Claims
OG exemplary drawing
 
1. A method for digitally reconstructing a surface of an object, comprising:
receiving image data including pixel values from one or more two-dimensional optical images of the object using at least one predetermined configuration of illuminators;
estimating surface gradient information for each pixel location according to a relationship between the at least one predetermined configuration of illuminators and the received image data, the surface gradient information representing approximate slopes at locations on the surface of the object corresponding to the pixel locations; and
determining surface height information defining a shape of the surface of the object in greater than two dimensions using said surface gradient information and noise information representing a noise distribution in the one or more optical images.