| US 7,352,474 B2 | ||
| Interferometric optical tomography | ||
| Brent L. Bachim, Smyrna, Ga. (US); and Thomas K. Gaylord, Atlanta, Ga. (US) | ||
| Assigned to Georgia Tech Research Corporation, Atlanta, Ga. (US) | ||
| Filed on Jan. 21, 2005, as Appl. No. 11/40,418. | ||
| Claims priority of provisional application 60/538119, filed on Jan. 21, 2004. | ||
| Prior Publication US 2005/0157312 A1, Jul. 21, 2005 | ||
| Int. Cl. G01B 11/02 (2006.01) | ||
| U.S. Cl. 356—512 [356/497] | 20 Claims |
| 1. A system for constructing a profile of an optical device, comprising:
an interferometer device used to collect interference images of a sample object at a sequence of angles around the sample
object;
a projection generator to produce projections of the sample object from the interference images at the sequence of angles;
and
a tomographic device to construct the profile of the optical device from the projections of the interference images, wherein
the profile is capable of characterizing small index variations of less than 1×10−4 for the sample object.
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