| US 7,352,033 B2 | ||
| Twin MONOS array for high speed application | ||
| Kimihiro Satoh, Portland, Oreg. (US); Tomoko Ogura, Hillsboro, Oreg. (US); Ki-Tae Park, Hwasung (Korea, Republic of); Nori Ogura, Hillsboro, Oreg. (US); and Yoshitaka Baba, Beaverton, Oreg. (US) | ||
| Assigned to Halo LSI Inc., Hillsboro, Oreg. (US) | ||
| Filed on Aug. 30, 2005, as Appl. No. 11/215,528. | ||
| Prior Publication US 2007/0047309 A1, Mar. 01, 2007 | ||
| Int. Cl. H01L 29/772 (2006.01) | ||
| U.S. Cl. 257—365 [257/324; 257/411] | 5 Claims |

| 1. A twin MONOS metal bit array structure comprising:
a plurality of memory cells two dimensionally disposed in a first direction, wherein memory cells adjacent in said first direction
are separated by isolation regions, and in a second direction crossing said first direction perpendicularly;
a plurality of metal bit line pairs;
a plurality of substrate silicon isolations in substrate silicon configured in straight lines and isolated said substrate
silicon stripes in between configured in straight lines wherein a pitch of said isolation is equal to two pitches of said
metal bit line pairs;
a plurality of conductive word gate lines crossing over said isolations and gate oxide overlying said silicon stripes extending
in said second direction;
a plurality of pairs of conductive control gate lines on sidewalls of said word gate lines extending in said second direction;
a plurality of diffusion regions having opposite polarity to a polarity of said substrate silicon wherein said diffusion regions
are located in said isolated silicon stripes between adjacent said conductive control gate lines in said first direction;
and
channels between adjacent said diffusion regions underlying said word gate lines and said control gates.
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