| US 7,510,770 B2 | ||
| Deep ultraviolet transmissive adhesive, and substrate produced by using such deep ultraviolet transmissive adhesive | ||
| Shinsuke Motomiya, Tokyo (Japan); Tatsuya Kojima, Tokyo (Japan); Takashi Takahashi, Tokyo (Japan); and Norio Tanaka, Souka (Japan) | ||
| Assigned to Kabushiki Kaisha Topcon, Tokyo (Japan); and Tanaka Polymer Laboratory, Souka-shi (Japan) | ||
| Filed on Mar. 31, 2006, as Appl. No. 11/394,368. | ||
| Claims priority of application No. 2005-101546 (JP), filed on Mar. 31, 2005. | ||
| Prior Publication US 2006/0280960 A1, Dec. 14, 2006 | ||
| Int. Cl. B32B 17/06 (2006.01); B32B 17/10 (2006.01); B32B 9/00 (2006.01); G06K 7/10 (2006.01); G02B 13/14 (2006.01) | ||
| U.S. Cl. 428—426 [428/441; 428/688; 359/350; 359/355; 359/361] | 5 Claims |
| 1. A laminate lens in an optical system for a precision inspecting device, comprising two laminate lens members joined together
by means of a deep ultraviolet transmissive adhesive,
wherein said deep ultraviolet transmissive adhesive comprises a substance represented by the following chemical formula:
CH2═CH—CH2—O—(CH2)2n—O—CH2—CH═CH2
wherein, n is an odd number represented by 2m+1, wherein m is a natural number, and
wherein one lens member is a quartz lens and the second lens member is a fluorite lens.
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