| US 7,509,859 B2 | ||
| Acceleration sensor with redundant contact holes | ||
| Takayuki Kai, Miyazaki (Japan) | ||
| Assigned to Oki Semiconductor Co., Ltd., Tokyo (Japan) | ||
| Filed on Dec. 12, 2007, as Appl. No. 11/954,357. | ||
| Application 11/954357 is a continuation of application No. 11/325336, filed on Jan. 05, 2006, granted, now 7,322,241. | ||
| Claims priority of application No. 2005-013395 (JP), filed on Jan. 20, 2005. | ||
| Prior Publication US 2008/0087087 A1, Apr. 17, 2008 | ||
| Int. Cl. G01P 15/12 (2006.01) | ||
| U.S. Cl. 73—514.33 [73/514.34] | 17 Claims |
| 1. An acceleration sensor comprising:
a mass;
a supporting member surrounding the mass;
a beam flexibly linking the mass to the supporting member;
a strain detector formed as a single continuous unit on the supporting member and the beam, the strain detector having a first
end formed on the beam and a second end formed on the supporting member;
a dielectric film at least covering the strain detector, the dielectric film having a plurality of first contact holes disposed
over the first end of the strain detector and a second contact hole disposed over the second end of the strain detector;
first wiring formed on the beam and in the first contact holes, making electrical contact with the strain detector; and
second wiring formed on the supporting member and in the second contact hole, making electrical contact with the strain detector.
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