| US 7,508,027 B2 | ||
| Single-poly EPROM device and method of manufacturing | ||
| Ralph Oberhuber, Kumhausen (Germany); and Reiner Jumpertz, Freising (Germany) | ||
| Assigned to Texas Instruments Incorporated, Dallas, Tex. (US) | ||
| Filed on Aug. 28, 2006, as Appl. No. 11/467,752. | ||
| Claims priority of application No. 10 2005 040 847 (DE), filed on Aug. 29, 2005. | ||
| Prior Publication US 2007/0048939 A1, Mar. 01, 2007 | ||
| Int. Cl. H01L 29/788 (2006.01) | ||
| U.S. Cl. 257—318 [257/320; 257/E27.078] | 8 Claims |
| 1. A single-poly EPROM device, comprising:
a source;
a drain;
a control gate, wherein the control gate is positioned in a substrate and laterally of a channel between the source and the
drain;
a floating gate, wherein the floating gate is positioned above the channel and above the control gate; and
an additional gate above the floating gate, wherein the additional gate is electrically connected to the control gate and
the additional gate is electrically isolated from the floating gate.
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