US 7,507,956 B2
Charged particle beam energy width reduction system for charged particle beam system
Jürgen Frosien, Riemerling (Germany); Ralf Degenhardt, Landsham (Germany); and Stefan Lanio, Erding (Germany)
Assigned to ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH, Heimstetten (Germany)
Appl. No. 10/571,346
PCT Filed Sep. 02, 2004, PCT No. PCT/EP2004/009802
§ 371(c)(1), (2), (4) Date Nov. 08, 2006,
PCT Pub. No. WO2005/024890, PCT Pub. Date Mar. 17, 2005.
Claims priority of application No. 03020711 (EP), filed on Sep. 11, 2003; and application No. 03028695 (EP), filed on Dec. 16, 2003.
Prior Publication US 2007/0069150 A1, Mar. 29, 2007
Int. Cl. H01J 40/00 (2006.01); H01J 47/00 (2006.01); H01J 3/14 (2006.01); H01J 3/26 (2006.01); H01J 49/42 (2006.01); H01J 1/50 (2006.01); G21K 1/08 (2006.01); G01K 1/08 (2006.01); G01N 23/00 (2006.01); G21K 7/00 (2006.01); A61N 5/00 (2006.01); G21G 5/00 (2006.01)
U.S. Cl. 250—305  [250/396 ML; 250/396 R; 250/310; 250/311; 250/398; 250/492.1] 49 Claims
OG exemplary drawing
 
1. Charged particle beam energy width reduction system for a charged particle beam with a z-axis along an optical axis, comprising
a first element acting in a focusing and dispersive manner in an x-z-plane, being a first Wien filter, and having a first z-position z1;
a second element acting in a focusing and dispersive manner in the x-z-plane, being a second Wien filter, and having a second z-position z2;
a charged particle selection element with a z-position between z1 and z2;
a focusing element with a z-position between z1 and z2, wherein the charged particle selection element has substantially the same z-position as the focusing element, and wherein the charged particle selection element is adapted to be a charged particle energy dependent selection element.