| US 7,507,481 B2 | ||
| Heat resistant coated member, making method, and treatment using the same | ||
| Noriaki Hamaya, Takefu (Japan); Masaru Konya, Takefu (Japan); and Noboru Yamamoto, Takefu (Japan) | ||
| Assigned to Shin-Etsu Chemical Co., Ltd., Tokyo (Japan) | ||
| Filed on Nov. 19, 2003, as Appl. No. 10/715,473. | ||
| Claims priority of application No. 2002-336769 (JP), filed on Nov. 20, 2002; application No. 2002-356171 (JP), filed on Dec. 09, 2002; and application No. 2003-089797 (JP), filed on Mar. 28, 2003. | ||
| Prior Publication US 2004/0110016 A1, Jun. 10, 2004 | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. B32B 9/00 (2006.01) | ||
| U.S. Cl. 428—469 [428/472; 428/701; 428/702; 428/698] | 18 Claims |
| 1. A heat resistant coated member comprising:
a substrate made of a material selected from the group consisting of Mo, Ta, W, Zr, and carbon; and
a coating of rare earth-containing oxide thereon, the rare earth-containing oxide coating including a surface layer having
a hardness of at least 50 HV in Vickers hardness.
|