US 7,506,451 B1
Camera based two-point vision alignment for semiconductor device testing handlers
Kexiang Ken Ding, San Diego, Calif. (US); Luis Muller, San Diego, Calif. (US); and Stephen Aloysius Wetzel, San Diego, Calif. (US)
Assigned to Delta Design, Inc., Poway, Calif. (US)
Filed on May 23, 2008, as Appl. No. 12/153,780.
Int. Cl. G01D 21/00 (2006.01); B65G 65/02 (2006.01)
U.S. Cl. 33—286  [33/645; 414/404] 10 Claims
OG exemplary drawing
 
1. A vision alignment system for a test handler, comprising:
a first camera, configured to view a position of a contactor in a handler coordinate system;
a pick-and-place handler, configured to move a tested device to the contactor for testing;
a second camera, configured to view a position of a device in a device holder coordinate system; two guiding features for correcting the position offset between the device and contactor; and
a guiding plate, having three actuators, configured to actuate the guiding features on the device holder to correct the position offset between the tested device and the contactor.