| US 7,502,482 B2 | ||
| Membrane and method for the production of the same | ||
| Alfons Dehé, Neufahrn (Germany); Stefan Barzen, München (Germany); and Marc Fueldner, Neubiberg (Germany) | ||
| Assigned to Infineon Technologies AG, Munich (Germany) | ||
| Filed on Apr. 11, 2005, as Appl. No. 11/104,396. | ||
| Application 11/104396 is a continuation of application No. PCT/EP03/11204, filed on Oct. 09, 2003. | ||
| Claims priority of application No. 102 47 487 (DE), filed on Oct. 11, 2002. | ||
| Prior Publication US 2005/0241944 A1, Nov. 03, 2005 | ||
| Int. Cl. H04R 25/00 (2006.01) | ||
| U.S. Cl. 381—175 [381/191] | 18 Claims |
| 1. A device, comprising:
a substrate with a main surface,
a counter electrode disposed on the substrate, wherein the counter electrode is at least partly formed on the main surface
of the substrate, wherein a surface of the counter electrode is facing the substrate;
a membrane supported spaced apart from the counter electrode to be opposed to the counter electrode, wherein another surface
of the counter electrode facing away from the substrate is opposed to the membrane,
wherein the membrane includes at least one antistick element in a central region of the membrane and at least one corrugation
groove in an edge region of the membrane surrounding the central region,
wherein the at least one corrugation groove and the at least one antisticking element are made of the same material as the
membrane and are integrally formed with the membrane in a common production step.
|