| US 7,502,127 B2 | ||
| Sensor device and stage device | ||
| Wei Gao, Sendai (Japan); Satoshi Kiyono, Sendai (Japan); Yoshiyuki Tomita, Hiratsuka (Japan); Toru Hirata, Yokohama (Japan); Yoji Watanabe, Sendai (Japan); and Kennichi Makino, Hiratsuka (Japan) | ||
| Assigned to Sumitomo Heavy Industries, Ltd., Tokyo (Japan); and Tohoku Technoarch Co., Ltd., Sendai-shi (Japan) | ||
| Filed on Oct. 27, 2006, as Appl. No. 11/588,271. | ||
| Application 11/588271 is a continuation of application No. PCT/JP2005/007481, filed on Apr. 19, 2005. | ||
| Claims priority of application No. 2004-131886 (JP), filed on Apr. 27, 2004; and application No. 2004-191828 (JP), filed on Jun. 29, 2004. | ||
| Prior Publication US 2007/0041024 A1, Feb. 22, 2007 | ||
| Int. Cl. G01B 11/14 (2006.01); G01B 11/02 (2006.01); G01B 11/26 (2006.01); G01C 1/00 (2006.01); G01D 5/36 (2006.01); G01N 21/86 (2006.01); G01V 8/00 (2006.01) | ||
| U.S. Cl. 356—614 [356/138; 356/616; 356/498; 250/237 G; 250/559.29; 250/559.37] | 9 Claims |
| 1. A sensor device comprising:
a reference grating having a configuration that is varied periodically in two dimensions;
a light source emitting light to the reference grating;
a spectral unit disposed between the light source and the reference grating and having a plurality of openings configured
to convert the light emitted by the light source into a plurality of parallel light beams through the plurality of openings,
wherein said plurality of parallel light beams output from the spectral unit reach the reference grating directly without
changing respective spaces between the light beams and each of said plurality of parallel light beams is reflected by the
reference grating; and
a detector unit comprising a photodetector configured to receive the light beams reflected by the reference grating, wherein
the detector unit is configured to detect a state of a movable body relative to the reference grating based on a change of
the reflected light beams collectively received by the photodetector.
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