| US 7,501,642 B2 | ||
| Radiation source | ||
| Johannes Hubertus Josephina Moors, Helmond (Netherlands); Vadim Yevgenyevich Banine, Helmond (Netherlands); Johannes Christiaan Leonardus Franken, Knegsel (Netherlands); Vladimir Vitalevitch Ivanov, Moscow (Russian Federation); Konstantin Nikolaevitch Koshelev, Moscow (Russian Federation); and Alexander Matthijs Struycken, Eindhoven (Netherlands) | ||
| Assigned to ASML Netherlands B.V., Veldhoven (Netherlands) | ||
| Filed on Dec. 29, 2005, as Appl. No. 11/319,770. | ||
| Prior Publication US 2007/0152175 A1, Jul. 05, 2007 | ||
| Int. Cl. G21K 5/10 (2006.01) | ||
| U.S. Cl. 250—492.21 [250/492.1; 250/493.1; 250/504 R] | 21 Claims |
| 1. A radiation source, comprising:
a plurality of electrodes between which, in use, an electrical discharge is produced to generate extreme ultraviolet radiation;
a region in which the electrodes are located and in which a gas pressure is reduceable; and
a conductive plate configured to shield the electrodes, wherein the plate is provided with a hole.
|