US 7,501,370 B2
High purity silicon carbide wafer boats
Yeshwanth Narendar, Westford, Mass. (US); and Richard F. Buckley, Shrewsbury, Mass. (US)
Assigned to Saint-Gobain Ceramics & Plastics, Inc., Worcester, Mass. (US)
Filed on Jan. 06, 2004, as Appl. No. 10/752,434.
Prior Publication US 2005/0148455 A1, Jul. 07, 2005
Int. Cl. C04B 35/565 (2006.01); C23C 16/00 (2006.01); A47G 19/08 (2006.01)
U.S. Cl. 501—88  [211/41.18; 206/711; 206/832; 118/500] 15 Claims
OG exemplary drawing
 
1. A wafer boat having a plurality of teeth for receiving a plurality of wafers, the wafer boat comprising recrystallized silicon carbide having a pore size of at least about 15 μm with a pore surface area of less than about 0.04 m2/g and comprising impurities of iron, copper, nickel, chromium, and calcium at a total concentration of less than about 200 ppm.