| US 7,501,229 B2 | ||
| Anti-reflective coating containing sulfur atom | ||
| Yoshiomi Hiroi, Toyama (Japan); Takahiro Kishioka, Toyama (Japan); Keisuke Nakayama, Toyama (Japan); and Rikimaru Sakamoto, Toyama (Japan) | ||
| Assigned to Nissan Chemical Industries, Ltd., Tokyo (Japan) | ||
| Appl. No. 10/592,805 PCT Filed Mar. 15, 2005, PCT No. PCT/JP2005/004554 § 371(c)(1), (2), (4) Date Sep. 14, 2006, PCT Pub. No. WO2005/088398, PCT Pub. Date Sep. 22, 2005. |
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| Claims priority of application No. 2004-073905 (JP), filed on Mar. 16, 2004. | ||
| Prior Publication US 2008/0107997 A1, May 08, 2008 | ||
| Int. Cl. G03F 7/11 (2006.01); C08L 101/00 (2006.01); H01L 21/027 (2006.01) | ||
| U.S. Cl. 430—325 [430/271.1; 430/272.1; 525/523; 525/417] | 4 Claims |
| 1. An anti-reflective coating forming composition comprising a solid content and a solvent
wherein a proportion of sulfur atom in the solid content is 5 to 25 mass %;
the solid content contains a polymer having sulfur atom in an amount of 8 to 30 mass %, a crosslinking compound and an acid
compound;
and the polymer has a repeating structural unit selected from the group consisting of formula (7), (8) and (9)
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