US 7,501,146 B2
Carbon nanotube emitter and its fabrication method and field emission device (FED) using the carbon nanotube emitter and its fabrication method
Hang-Woo Lee, Suwon-si (Korea, Republic of); Yong-Wan Jin, Seoul (Korea, Republic of); In-Taek Han, Seoul (Korea, Republic of); Ha-Jin Kim, Suwon-si (Korea, Republic of); and Min-Jong Bae, Anyang-si (Korea, Republic of)
Assigned to Samsung SDI Co., Ltd., Suwon-si, Gyeonggi-do Jorea (US)
Filed on Oct. 06, 2005, as Appl. No. 11/244,106.
Claims priority of application No. 10-2004-0081344 (KR), filed on Oct. 12, 2004.
Prior Publication US 2006/0192475 A1, Aug. 31, 2006
Int. Cl. B05D 5/00 (2006.01); B05D 5/12 (2006.01); H01J 9/00 (2006.01)
U.S. Cl. 427—77  [427/58; 427/123; 427/126.6; 313/310; 977/840; 977/842; 977/847; 977/890] 19 Claims
OG exemplary drawing
 
10. A method of fabricating a field emission device, comprising:
growing a plurality of first carbon nanotubes on a first substrate having a catalyst material layer formed thereon;
separating the first carbon nanotubes from the first substrate and immersing the first separated carbon nanotubes into a dispersion solution;
sequentially forming a cathode electrode, an insulating layer, and a gate electrode on the second substrate and forming an emitter hole to expose a part of the cathode electrode;
coating a top surface of the gate electrode and an inner wall of the emitter hole with photoresist to cover them and patterning the photoresist to expose the cathode electrode beneath the emitter hole;
coating the photoresist and the exposed cathode electrode with the dispersion solution and baking them at a predetermined temperature;
removing the photoresist to leave the first carbon nanotubes on the exposed cathode electrode; and
growing a plurality of second carbon nanotubes from a plurality of nano catalyst particles on the surface of the first carbon nanotubes.