| US 7,500,303 B2 | ||
| Method of fabricating a magnetic sensor on a wafer | ||
| Tsung Yuan Chen, San Jose, Calif. (US); Kuok San Ho, Santa Clara, Calif. (US); and Mustafa Michael Pinarbasi, Morgan Hill, Calif. (US) | ||
| Assigned to Hitachi Global Storage Technologies Netherlands B.V., Amsterdam (Netherlands) | ||
| Filed on May 19, 2006, as Appl. No. 11/437,585. | ||
| Prior Publication US 2007/0266550 A1, Nov. 22, 2007 | ||
| Int. Cl. G11B 5/127 (2006.01); H04R 31/00 (2006.01) | ||
| U.S. Cl. 29—603.16 [29/603.13; 29/603.14; 29/603.15; 29/603.18; 216/22; 216/48; 360/316; 360/324.1; 360/324.11; 360/324.12; 427/127; 427/128; 427/129; 427/131] | 17 Claims |

| 1. A method of fabricating a magnetic sensor on a wafer comprising the steps of:
depositing thin film layers for the magnetic sensor on the wafer;
depositing electrically conductive metallic material for overlaid leads over the thin film layers for the magnetic sensor;
depositing a mask material comprising diamond-like carbon (DLC) or silicon dioxide over the electrically conductive metallic
material for the overlaid leads;
patterning a photoresist mask with a first hole defining a first predetermined area on the mask material selected to be an
active area of the magnetic sensor;
removing, using an oxygen-based RIE process, the mask material from the first predetermined area to form a lead mask with
a hole over exposed electrically conductive metallic material that is not removed by the oxygen-based RIE process;
stripping the photoresist mask off of the wafer leaving the lead mask;
removing electrically conductive metallic material in the first predetermined area between first and second lead pads of electrically
conductive metallic material that are protected from removal by the lead mask;
removing the lead mask from the wafer; and
removing the thin film layers for the magnetic sensor and the electrically conductive metallic material from a second predetermined
area to define a width of the sensor, the second predetermined area being wider than the active area of the magnetic sensor
and disposed to include first and second lead pads of electrically conductive metallic material and the active area of the
magnetic sensor.
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