| US 7,339,661 B2 | ||
| Dark field inspection system | ||
| Doron Korngut, 79 Emek Hahula, Modiin 71700 (Israel); Erez Admoni, 71 Menahem Begin Street, Petah-Tikvah 99785 (Israel); Ofer Kadar, 10/2 Itamar ben-avi Street, Jerusalem 92348 (Israel); Lev Haikoviz, 14 A Ein-Gedi St., Givatayim (Israel); Haim Feldman, Bareket 21, Nof-Ayalon 99785 (Israel); and Avishay Guetta, Bieler 13, Rehovot 76287 (Israel) | ||
| Appl. No. 10/511,092 PCT Filed Sep. 08, 2003, PCT No. PCT/US03/28062 § 371(c)(1), (2), (4) Date Apr. 26, 2005, PCT Pub. No. WO2004/031754, PCT Pub. Date Apr. 15, 2004. |
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| Prior Publication US 2005/0219518 A1, Oct. 06, 2005 | ||
| Int. Cl. G01N 21/88 (2006.01) | ||
| U.S. Cl. 356—237.2 [356/237.4; 356/237.5; 356/394; 250/234] | 65 Claims |
| 1. Apparatus for inspection of a sample, comprising:
a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample;
a plurality of image sensors, each of which is configured to receive the radiation scattered from the area into a different,
respective angular range, so as to form respective images of the area;
an image processor, which is adapted to process at least one of the respective images so as to detect a defect on the surface;
collection optics, which comprise:
a plurality of objectives, each of which is respectively associated with one of the image sensors so as to capture the radiation
scattered from the surface over the respective angular range, and to convey the captured radiation to the one of the image
sensors, wherein the objectives have respective optical axes that intercept the surface at respective oblique angles;
a plurality of tilt correction units, which are associated respectively with the objectives and are adapted to correct for
the respective oblique angles so as to create substantially undistorted intermediate images;
a plurality of focusing optics, which are optically coupled to focus the intermediate images onto the image sensors.
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