| US 7,498,825 B2 | ||
| Probe card assembly with an interchangeable probe insert | ||
| Benjamin N. Eldridge, Danville, Calif. (US); Carl V. Reynolds, Pleasanton, Calif. (US); Nobuhiro Kawamata, Ishioka (Japan); and Takao Saeki, Yokohama (Japan) | ||
| Assigned to FormFactor, Inc., Livermore, Calif. (US) | ||
| Filed on Dec. 21, 2005, as Appl. No. 11/306,270. | ||
| Claims priority of provisional application 60/595480, filed on Jul. 08, 2005. | ||
| Prior Publication US 2007/0007977 A1, Jan. 11, 2007 | ||
| Int. Cl. G01R 31/02 (2006.01) | ||
| U.S. Cl. 324—754 | 18 Claims |
| 1. A probe card apparatus comprising:
a first structure;
a second structure comprising electrical contacts;
a plurality of compliant electrical connections to the electrical contacts;
a mechanism configured to change an orientation of the second structure with respect to the first structure; and
a third structure comprising a plurality of probes disposed to contact an electronic device to be tested, the third structure
configured to be attached to and detached from the second structure, wherein while attached to the second structure ones of
the probes are electrically connected to ones of the electrical contacts,
wherein the third structure comprises:
a probe insert comprising the probes, and
a holder attachable to and detachable from the second structure and configured to hold the probe insert.
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