US 7,498,718 B2
Stacked piezoelectric diaphragm members
James Vogeley, Yorktown, Va. (US)
Assigned to Adaptivenergy, LLC., Hampton, Va. (US)
Filed on Oct. 10, 2006, as Appl. No. 11/548,117.
Application 11/548117 is a continuation in part of application No. 11/104669, filed on Apr. 13, 2005.
Prior Publication US 2007/0243084 A1, Oct. 18, 2007
Int. Cl. H01L 41/08 (2006.01)
U.S. Cl. 310—324  [310/328] 26 Claims
OG exemplary drawing
 
1. A diaphragm assembly comprising:
at least two piezoelectric diaphragm members arranged in a stacking direction, each piezoelectric diaphragm member comprising at least a piezoelectric material; an interface layer situated between adjacent piezoelectric diaphragm members, the interface layer in the stacking direction being displaceable and either incompressible or resilient and configured to transmit the force applied by the displacement of a first of the piezoelectric diaphragm members on a first side of the interface layer to a second of the piezoelectric diaphragm members on a second side of the interface layer;
wherein the interface layer comprises a gas.