| US 7,498,215 B2 | ||
| Method of producing product including silicon wires | ||
| Morimi Hashimoto, Wako (Japan); and Eiichi Fujii, Kamakura (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Mar. 16, 2007, as Appl. No. 11/687,064. | ||
| Claims priority of application No. 2006-101879 (JP), filed on Apr. 03, 2006. | ||
| Prior Publication US 2007/0232036 A1, Oct. 04, 2007 | ||
| Int. Cl. H01L 21/336 (2006.01) | ||
| U.S. Cl. 438—197 [977/762; 977/938] | 8 Claims |
| 1. A method of producing a product including silicon wires, comprising:
dispersing the silicon wires, which are covered with a hydrophobic insulating polymer solution, in a solvent having a polarity
opposite to that of the silicon wires;
arranging longitudinal directions of the silicon wires so that each one of the silicon wires is positioned end to end to one
another;
fixing the silicon wires whose longitudinal directions are arranged end to end to one another by using one of a crosslinking
reaction and a polymerization reaction of the polymer, and
collecting the silicon wires fixed in accordance with said fixing step by forming one of a silicon wire monolayer sheet and
a silicon wire monolayer ribbon on a substrate.
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