| US 7,495,328 B2 | ||
| Micromechanical component | ||
| Frank Reichenbach, Wannweil (Germany); Freider Haag, Wannweil (Germany); and Arnd Kaelberer, Schlierbach (Germany) | ||
| Assigned to Robert Bosch GmbH, Stuttgart (Germany) | ||
| Filed on Jul. 24, 2006, as Appl. No. 11/493,702. | ||
| Claims priority of application No. 10 2005 038 755 (DE), filed on Aug. 17, 2005. | ||
| Prior Publication US 2007/0040230 A1, Feb. 22, 2007 | ||
| Int. Cl. H01L 23/22 (2006.01); H01L 23/24 (2006.01) | ||
| U.S. Cl. 257—687 [257/724; 257/787; 257/E23.116; 257/E23.128] | 19 Claims |
| 1. A micromechanical component comprising:
a structure such that a material flow is guided from at least one preferred direction to uniformly envelop the micromechanical
component; and
a cap affixed to the micromechanical component, wherein the cap has at least one structured surface having grooves running
in a direction of the material flow to guide the material flow.
|