	US 7,494,555 B2
	Microfabricated elastomeric valve and pump systems
Marc A. Unger, South San Francisco, Calif. (US); Hou-Pu Chou, Pasadena, Calif. (US); Todd A. Thorsen, Pasadena, Calif. (US); Axel Scherer, Laguna Beach, Calif. (US); and Stephen R. Quake, Stanford, Calif. (US)
Assigned to California Institute of Technology, Pasadena, Calif. (US)
Filed on Sep. 20, 2004, as Appl. No. 10/945,737.
Application 10/945737 is a continuation of application No. 09/796378, filed on Feb. 28, 2001, granted, now 6,793,753.
Application 09/796378 is a continuation of application No. 09/605520, filed on Jun. 27, 2000.
Claims priority of provisional application 60/186856, filed on Mar. 03, 2000.
Claims priority of provisional application 60/147199, filed on Aug. 03, 1999.
Claims priority of provisional application 60/141503, filed on Jun. 28, 1999.
Prior Publication US 2005/0112882 A1, May 26, 2005
Int. Cl. B32B 37/00 (2006.01)

U.S. Cl. 156—60

12 Claims

1. A method of microfabricating an elastomeric structure, comprising:

microfabricating a first elastomeric layer, wherein the first elastomeric layer is fabricated on a first micromachined mold having at least one raised protrusion which forms at least one recess in the bottom of the first elastomeric layer;

microfabricating a second elastomeric layer, wherein the second elastomeric layer is fabricated on a second micromachined mold having at least one raised protrusion which forms at least one recess in the bottom of the second elastomeric layer;

positioning the second elastomeric layer on top of the first elastomeric layer such that at least one recess in the second layer substantially perpendicularly passes over at least one recess in the first layer; and

bonding a bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer.