| US 7,492,460 B2 | ||
| Attenuated-total-reflection measurement apparatus | ||
| Jun Koshoubu, Hachioji (Japan); and Noriaki Soga, Hachioji (Japan) | ||
| Assigned to Jasco Corporation, Hachioji-shi, Tokyo (Japan) | ||
| Filed on Jan. 23, 2006, as Appl. No. 11/337,817. | ||
| Claims priority of application No. 2005-016439 (JP), filed on Jan. 25, 2005. | ||
| Prior Publication US 2006/0164633 A1, Jul. 27, 2006 | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. G01N 21/55 (2006.01) | ||
| U.S. Cl. 356—445 | 6 Claims |

| 1. An attenuated-total-reflection measurement apparatus for collecting light onto a contact surface between a sample and an
ATR prism at an incident angle greater than or equal to a critical angle and for measuring total-reflection light from the
contact surface, comprising:
light-irradiating system for emitting the light which is collected onto the contact surface;
a photodetector system for detecting the total-reflection light from the contact surface;
an aperture for restricting the light which the photodetector system detects to only light from a specific site in the contact
surface, to set the specific site as a measurement site;
a detection-side scanning mirror provided in a light path extending from the ATR prism to the aperture; and
an irradiation-side scanning mirror for guiding the light from the light-irradiating system to the ATR prism;
wherein the irradiation-side scanning mirror is configured to allow the orientation of a reflecting surface thereof to be
changed independent of the detection-side scanning mirror, and the irradiated position on the contact surface is changed by
moving the reflecting surface of the irradiation-side scanning mirror with respect to the irradiation light from the light-irradiating
system, and
wherein the detection-side scanning mirror is configured to allow the orientation of a reflecting surface thereof to be changed
independent of the irradiation-side scanning mirror, and the measurement site in the contact surface, which is to be measured
with the photodetector system, is changed by moving the reflecting surface of the detection-side scanning mirror with respect
to the total-reflection light from the contact surface, to perform mapping measurement in the contact surface.
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