| US 7,492,455 B1 | ||
| Discrete polarization state spectroscopic ellipsometer system and method of use | ||
| Blaine D. Johs, Lincoln, Nebr. (US); Martin M. Liphardt, Lincoln, Nebr. (US); Ping He, Lincoln, Nebr. (US); and Jeffrey S. Hale, Lincoln, Nebr. (US) | ||
| Assigned to J.A. Woollam Co., Inc., Lincoln, Nebr. (US) | ||
| Filed on Jul. 10, 2006, as Appl. No. 11/483,888. | ||
| Application 11/483888 is a continuation in part of application No. 09/945962, filed on Sep. 04, 2001, granted, now 7,075,649. | ||
| Application 09/945962 is a continuation in part of application No. 09/517125, filed on Feb. 29, 2000, abandoned. | ||
| Application 09/517125 is a continuation in part of application No. 09/246888, filed on Feb. 08, 1999, granted, now 6,084,675. | ||
| Application 09/246888 is a continuation in part of application No. 09/232257, filed on Jan. 19, 1999, granted, now 6,141,102. | ||
| Application 09/232257 is a continuation in part of application No. 09/225118, filed on Jan. 04, 1999, granted, now 6,084,674. | ||
| Application 09/225118 is a continuation in part of application No. 09/223822, filed on Jan. 04, 1999, granted, now 6,118,537. | ||
| Application 09/223822 is a continuation in part of application No. 09/225371, filed on Jan. 04, 1999, granted, now 6,100,981. | ||
| Application 09/225371 is a continuation in part of application No. 09/225076, filed on Jan. 04, 1999, granted, now 5,963,325. | ||
| Application 09/225076 is a continuation in part of application No. 08/997311, filed on Dec. 23, 1997, granted, now 5,946,098. | ||
| Application 08/997311 is a continuation in part of application No. 08/912211, filed on Aug. 15, 1997, granted, now 5,872,630. | ||
| Application 08/912211 is a continuation in part of application No. 08/618820, filed on Mar. 20, 1996, granted, now 5,706,212. | ||
| Application 08/618820 is a continuation in part of application No. 08/530892, filed on Sep. 20, 1995, granted, now 5,666,201. | ||
| Claims priority of provisional application 60/438187, filed on Jan. 07, 2003. | ||
| Claims priority of provisional application 60/229755, filed on Sep. 05, 2000. | ||
| Int. Cl. G01J 4/00 (2006.01) | ||
| U.S. Cl. 356—369 [356/364] | 6 Claims |
| 1. A spectroscopic ellipsometer system comprising:
a source of a polychromatic beam of electromagnetic radiation;
a stage for supporting a sample system;
a multi-element spectroscopic detector system; said spectroscopic ellipsometer system further comprising:
at least two polarizers (P1) (P2), which remain fixed in position during data acquisition, said polarizers (P1) (P2) being in the source of a beam of polychromatic electromagnetic radiation, before the stage for supporting a sample system;
an analyzer, which remains fixed in position during data acquisition, after said stage for supporting a sample system and
before said multi-element spectroscopic detector system;
and at least one means for discretely, sequentially, modifying a polarization state of a beam of electromagnetic radiation
provided by said source of a beam of polychromatic electromagnetic radiation through a plurality of polarization states, said
means for discretely, sequentially, modifying a polarization state of a beam of electromagnetic radiation provided by said
source of a beam of polychromatic electromagnetic radiation through a plurality of polarization states being present at least
one location selected from the group consisting of:
between said polarizer and said stage for supporting a sample system; and
between said stage for supporting a sample system and said analyzer; and positioned so that said beam of electromagnetic radiation transmits therethrough in use;said ellipsometer system being configured such that a polychromatic beam of electromagnetic radiation provided by said source
thereof is directed to interact with a sample system present on said stage for supporting a sample system;said ellipsometer system being distinguished in that said source of a beam of polychromatic electromagnetic radiation comprises:
a. at least a first (S1) and a second (S2) source of polychromatic electromagnetic radiation beams, (B1) and (B2) respectively, which have said polarizers, (P1) and (P2) respectively, associated therewith; and
b. at least one electromagnetic beam combining (BC1) means comprising an uncoated plate with transmission characteristics that are determined by angle-of-incidence and polarization
state of a beam of electromagnetic such that in use one of said (B1) and (B2) beams after passing through its associated polarizer (P1) (P2), passes through said beam combining (BC1) means, and the other thereof, after passing through its associated polarizer (P2) (P1), reflects from said beam combining means (BC1), such that a polarized beam containing wavelengths from at least one of said (S1) and (S2) sources emerges from said beam combining (BC1) means and is directed to interact with said sample system present on said stage for supporting a sample system;
said at least first (S1) and second (S2) sources being separately energizable.
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