US 7,491,946 B2
Electrostatic deflection system for corpuscular radiation
Stefan Risse, Jena (Germany); Thomas Peschel, Jena (Germany); Christoph Damm, Jena (Germany); Andreas Gebhardt, Apolda (Germany); Mathias Rohde, Jena (Germany); Christoph Schenk, Jena (Germany); Thomas Elster, Jena (Germany); Hans-Joachim Doering, Jena (Germany); and Gerhard Schubert, Jena (Germany)
Assigned to Leica Microsystems Lithography GmbH, Jena (Germany)
Filed on Feb. 03, 2006, as Appl. No. 11/346,666.
Claims priority of application No. 10 2005 005 801 (DE), filed on Feb. 04, 2005.
Prior Publication US 2006/0192133 A1, Aug. 31, 2006
Int. Cl. H01J 37/147 (2006.01)
U.S. Cl. 250—396R 21 Claims
OG exemplary drawing
 
1. An electrostatic deflection system for corpuscular beams, comprising:
an axially symmetric arrangement through which an electron beam is directed, said arrangement being formed as an inwardly hollow carrier in which rod-shaped electrodes are held;
said carrier having two ends in direction of a longitudinal symmetry axis of the deflection system and being formed of at least two carrier members which are connected to one another.