| US 7,491,934 B2 | ||
| SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast | ||
| Stephen Jesse, Knoxville, Tenn. (US); David B. Geohegan, Knoxville, Tenn. (US); and Michael Guillorn, Brooktondale, N.Y. (US) | ||
| Assigned to UT-Battelle, LLC, Oak Ridge, Tenn. (US) | ||
| Filed on Jan. 13, 2006, as Appl. No. 11/331,840. | ||
| Prior Publication US 2007/0164218 A1, Jul. 19, 2007 | ||
| Int. Cl. G01N 23/00 (2006.01) | ||
| U.S. Cl. 250—310 [250/306; 250/307; 324/751] | 20 Claims |
| 1. An apparatus comprising:
a sample holder for a scanning electron microscope having an electrical interconnect and leads on top of the sample holder
electrically connected to the electrical interconnect, the sample mounted on the sample holder comprising a plurality of electrodes,
the sample holder comprising wire bonds connecting the leads to the plurality of electrodes;
a power source and a controller connected to the electrical interconnect for applying voltage to the sample holder to control
the secondary electron emission from a sample mounted on the sample holder; and
a computer coupled to a secondary electron detector to generate images of the secondary electron emission from the sample.
|