| US 7,491,913 B2 | ||
| Bake apparatus for use in spin-coating equipment | ||
| Myoung-Kuy Lee, Suwon-si (Korea, Republic of) | ||
| Assigned to Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do (Korea, Republic of) | ||
| Filed on Apr. 01, 2005, as Appl. No. 11/95,554. | ||
| Claims priority of application No. 10-2004-0030370 (KR), filed on Apr. 30, 2004. | ||
| Prior Publication US 2005/0244759 A1, Nov. 03, 2005 | ||
| Int. Cl. F27B 5/14 (2006.01); C23C 16/00 (2006.01) | ||
| U.S. Cl. 219—390 [219/405; 219/411; 219/444.1; 392/386; 392/388; 392/416; 392/418; 118/715; 118/723 VE; 118/724; 118/725; 118/728; 118/729; 118/733] | 6 Claims |
| 1. Bake apparatus for use in baking a substrate, comprising:
a chamber;
a hot plate disposed within the chamber;
an air injection passageway communicating with the interior of the chamber such that gas can be injected therethrough into
the chamber;
an air exhaust opening communicating with the interior of the chamber at an upper part thereof and through which gas is exhausted
from the chamber to the outside; and
a first buffer plate disposed within the chamber at the upper part thereof as interposed between the hot plate and the location
at which the exhaust opening communicates with the interior of the chamber, the first buffer plate having a plurality of discharge
holes therethrough such that gas within the chamber is exhausted through the exhaust opening via the discharge holes, and
respective ones of the discharge holes lying along each of a series of concentric circles whose centers coincide at a central
portion of the buffer plate.
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