| US 7,491,628 B2 | ||
| Method for patterning large scale nano-fibrous surfaces using capillography | ||
| Flavio Noca, Altadena, Calif. (US); Elijah B. Sansom, Pasadena, Calif. (US); Jijie Zhou, Singapore (Singapore); and Morteza Gharib, San Marino, Calif. (US) | ||
| Assigned to California Institute of Technology, Pasadena, Calif. (US) | ||
| Filed on May 05, 2005, as Appl. No. 11/124,523. | ||
| Claims priority of provisional application 60/568563, filed on May 05, 2004. | ||
| Prior Publication US 2006/0088848 A1, Apr. 27, 2006 | ||
| Int. Cl. H01L 21/20 (2006.01); H01L 21/36 (2006.01) | ||
| U.S. Cl. 438—493 [438/500; 438/507; 438/758; 438/800; 257/E51.04; 257/E21.09; 977/742] | 32 Claims |
| 1. A method of controllably patterning a plurality of nanofeatures comprising:
providing a plurality of nanofeatures anchored on at least one end to a substrate; disposing a quantity of a fluid onto at least a portion of the plurality of nanofeatures;
flowing the fluid onto the plurality of nanofeatures such that the fluid penetrates between the plurality of nanofeatures;
and
controllably dissipating the fluid from the plurality of nanofeatures such that the nanofeatures are reoriented by the capillary
forces of the dissipating fluid to form a plurality of repeating nanostructures from the reoriented nanofeatures,
wherein the size and optionally at least one of the density and shape of the nanostructures are determined by controlling
the rate at which the fluid dissipates from the substrate and by selecting the surface tension of the dissipating fluid.
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