| US 7,491,269 B2 | ||
| Method for catalytic growth of nanotubes or nanofibers comprising a NiSi alloy diffusion barrier | ||
| Pierre Legagneux, St Denis (France); Didier Pribat, Sevres (France); and Yannig Nedellec, Montpellier (France) | ||
| Assigned to Thales, (France) | ||
| Appl. No. 10/497,079 PCT Filed Dec. 03, 2002, PCT No. PCT/FR02/04155 § 371(c)(1), (2), (4) Date Jun. 09, 2005, PCT Pub. No. WO03/048040, PCT Pub. Date Jun. 12, 2003. |
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| Claims priority of application No. 01 15647 (FR), filed on Dec. 04, 2001. | ||
| Prior Publication US 2005/0235906 A1, Oct. 27, 2005 | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. C30B 29/62 (2006.01) | ||
| U.S. Cl. 117—94 [117/95; 117/96; 117/89; 117/105] | 20 Claims |
| 1. A process for the growth of nanotubes or nanofibers on a substrate comprising:
forming an upper layer consisting of a first material;
formatting, on the surface of the upper layer, a barrier layer consisting of an alloy of the first material and of a second
material, said alloy being stable at a first temperature;
formatting spots of catalyst consisting of the second material, on the surface of the alloy layer; and
growing nanotubes or nanofibers using the spots of catalyst at a second temperature below said first temperature.
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