| US 7,491,246 B2 | ||
| Capacitor electrodes produced with atomic layer deposition for use in implantable medical devices | ||
| Joachim Hossick-Schott, Minneapolis, Minn. (US); Naim S. Istephanous, Roseville, Minn. (US); John D. Norton, New Brighton, Minn. (US); Anthony W. Rorvick, Champlin, Minn. (US); and Richard W. A. Francis, White Bear Lake, Minn. (US) | ||
| Assigned to Medtronic, Inc., Minneapolis, Minn. (US) | ||
| Filed on Mar. 31, 2006, as Appl. No. 11/278,307. | ||
| Prior Publication US 2007/0236867 A1, Oct. 11, 2007 | ||
| Int. Cl. H01L 21/00 (2006.01) | ||
| U.S. Cl. 29—25.01 | 25 Claims |
| 1. An implantable medical device comprising:
a high voltage electrolytic capacitor cell that includes:
a first electrode substrate that comprises a valve metal;
a dielectric layer formed on the electrode substrate by atomic layer deposition; and a solid electrolyte in contact with the dielectric layer.
|