| US 7,490,552 B1 | ||
| MEMS microdetonator/initiator apparatus for a MEMS fuze | ||
| Daniel Jean, Odenton, Md. (US); Michael Beggans, Waldorf, Md. (US); Gerald Laib, Olney, Md. (US); and David Olson, Chesapeake Beach, Md. (US) | ||
| Assigned to The United States of America as represented by the Secretary of the Navy, Washington, D.C. (US) | ||
| Filed on Jul. 31, 2007, as Appl. No. 11/894,629. | ||
| Int. Cl. F42C 15/26 (2006.01) | ||
| U.S. Cl. 102—231 [200/61.08; 361/251; 102/221; 102/202.5] | 9 Claims |
| 1. A MEMS microdetonator/initiator apparatus for a MEMS fuze, comprising:
a bottom substrate layer, a top device layer and an intermediate oxide layer joining said top and bottom layers;
a slider defined in said top device layer with said slider including an enlarged end portion, wherein said slider comprises
a portion adjacent said end portion devoid of any underlying said intermediate oxide layer so as to permit movement thereof
relative to said bottom substrate layer;
a slider drive operable to move said slider from an initial position to a final position;
a walled chamber being defined in said bottom substrate layer where said walled chamber is connected to said enlarged end
portion of said slider by said intermediate oxide layer,
wherein said bottom substrate layer, which is adjacent said walled chamber, is removed to allow movement of said walled chamber,
and
wherein said walled chamber comprises a hollow interior extending to an underside of said enlarged end portion;
a microdetonator being positioned within said hollow interior of said walled chamber,
wherein said bottom substrate layer includes a void adjacent said walled chamber to allow movement of said walled chamber
into said void when said slider is moved by said drive to said final position; and
an initiator being positioned so that when said slider is in said final position, said initiator, when supplied with voltage,
is operable to initiate said microdetonator.
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