| US 7,490,524 B2 | ||
| Force sensor chip | ||
| Takeshi Ohsato, Wako (Japan); and Nobuhiro Sakurai, Wako (Japan) | ||
| Assigned to Honda Motor Co., Ltd., Tokyo (Japan) | ||
| Filed on Jul. 31, 2007, as Appl. No. 11/882,327. | ||
| Claims priority of application No. P2006-216143 (JP), filed on Aug. 08, 2006. | ||
| Prior Publication US 2008/0034897 A1, Feb. 14, 2008 | ||
| Int. Cl. G01L 1/04 (2006.01) | ||
| U.S. Cl. 73—862.629 | 17 Claims |
| 1. A force sensor chip comprising:
a base member to which an external force is applied, said base member including:
an operating part provided in a central portion of said base member and having an external-force acting area section;
a supporting part provided, in an outer peripheral portion of said base member, for supporting said operating part;
an intermediate part provided from near between an outer periphery of said operating part and an inner peripheral portion
of said supporting part;
a first connecting arm section connecting said operating part and said intermediate part; and
a second connecting arm section connecting said intermediate part and said supporting part; and
at least one strain resistance element provided on each of respective deformation-generating portions of said first connecting
arm section and said second connecting arm section,
wherein the base member further comprises a first set of elongated holes forming an innermost substantially annular hole between
the operating part and the intermediate part, and a second set of elongated holes forming an outermost substantially annular
hole between the intermediate part and the supporting part, and
wherein the first connecting arm section is disposed between adjacent elongated holes of the first set of elongated holes
and the second connecting arm section is disposed between adjacent elongated holes of the second set of elongated holes.
|