US 7,489,593 B2
	Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
An Nguyen-Dinh, Valleres (France); Nicolas Felix, Tours (France); and Aimé Flesch, Andrésy (France)
Assigned to Vermon, Tours Cedex (France)
Filed on Nov. 30, 2004, as Appl. No. 10/998,952.
Prior Publication US 2006/0116585 A1, Jun. 01, 2006
Int. Cl. H04R 19/00 (2006.01)

U.S. Cl. 367—181

18 Claims

1. An ultrasonic transducer comprising a silicon substrate including a bottom electrode, a membrane support, a first front electrostatic membrane including a first front electrode and a second membrane disposed on said first membrane and including a second front electrode deposited on a top surface of the second membrane, said first and second membranes being supported by said membrane support, and said transducer further comprising interconnection paths for connecting the first and second front electrodes to an imaging system.