| US 7,489,441 B2 | ||
| Monocrystalline optical component with curved surface and multilayer coating | ||
| Patrick Scheible, Aalen (Germany); Guenter Scheible, legal representative, and Sigrid Scheible, legal representative; Harald Schink, Aalen (Germany); and Alexander Hirnet, Ellwangen (Germany) | ||
| Assigned to Carl Zeiss SMT AG, Oberkochen (Germany) | ||
| Filed on May 17, 2005, as Appl. No. 11/130,173. | ||
| Claims priority of provisional application 60/571502, filed on May 17, 2004. | ||
| Prior Publication US 2005/0286827 A1, Dec. 29, 2005 | ||
| Int. Cl. C30B 29/60 (2006.01) | ||
| U.S. Cl. 359—355 [117/902; 359/580] | 9 Claims |
| 1. An optical component comprising:
a substrate, on which at least one curved substrate surface is formed that defines an optical axis of the optical component,
wherein the substrate surface is coated with a multilayer coating that is active in the ultraviolet region at a design wavelength
λ0 and comprises a first layer, applied to the substrate surface, made from a first dielectric material and at least one second
layer, applied to the first layer, made from a second dielectric material,
wherein the substrate consists essentially of a crystal material that has an axially parallel crystal direction, running parallel
to the optical axis, and edge crystal directions perpendicular to edge regions of the curved substrate surface,
wherein an angle between the axially parallel crystal direction and the edge crystal directions is at least 17°, and the first
layer has an essentially untextured layer structure, and,
wherein the axially parallel crystal direction deviates by less than 15° from a low index crystal direction of the crystal
material.
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