| US 7,489,141 B1 | ||
| Surface micro sensor and method | ||
| Bert M. Vermeire, Phoenix, Ariz. (US); and Farhang F. Shadman, Tucson, Ariz. (US) | ||
| Assigned to Environmental Metrology Corporation, Tucson, Ariz. (US) | ||
| Filed on Aug. 16, 2005, as Appl. No. 11/205,636. | ||
| Claims priority of provisional application 60/624131, filed on Nov. 02, 2004. | ||
| Claims priority of provisional application 60/602449, filed on Aug. 18, 2004. | ||
| Int. Cl. G01R 27/00 (2006.01); G01R 27/04 (2006.01); G01R 27/32 (2006.01); G01R 27/08 (2006.01) | ||
| U.S. Cl. 324—646 [324/71.1; 324/693] | 18 Claims |
| 1. A micro sensor for electrochemical monitoring of surface residue, comprising:
a supporting dielectric layer;
first and second electrodes embedded in the surface of the dielectric layer, each said electrode comprising an active region
that lies on the surface of the supporting dielectric layer and a connector beneath the active region;
a thin covering dielectric layer over said electrodes and said supporting dielectric layer providing a fluid-solid interface
at the surface of the covering dielectric layer, a region between said first and second electrodes filled with dielectric
material from said supporting or thin covering dielectric layers; and
a surface segment of said thin covering dielectric layer defined above and between the active regions of said first and second
electrodes at the fluid-solid interface;
said connectors adapted to carry an ac measurement signal to the active regions of the electrodes to measure a total sensor
impedance sensitive to the impedance of said surface segment.
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