US 7,489,064 B2
Boundary acoustic wave device
Hajime Kando, Ritto (Japan)
Assigned to Murata Manufacturing Co., Ltd, Kyoto (Japan)
Filed on Jan. 08, 2008, as Appl. No. 11/970,623.
Application 11/970623 is a continuation of application No. PCT/JP2006/309464, filed on May 11, 2006.
Claims priority of application No. 2005-212561 (JP), filed on Jul. 22, 2005.
Prior Publication US 2008/0111450 A1, May 15, 2008
Int. Cl. H03H 9/25 (2006.01)
U.S. Cl. 310—313A 15 Claims
OG exemplary drawing
 
1. A boundary acoustic wave device comprising:
a quartz substrate;
an IDT located on the quartz substrate; and
a dielectric arranged on the quartz substrate so as to cover the IDT; wherein
a boundary acoustic wave propagates across a boundary between the quartz substrate and the dielectric;
a thickness of the IDT is determined so that the velocity of the boundary acoustic wave is below those of a slow transverse wave propagating across the quartz substrate and a slow transverse wave propagating across the dielectric; and
θ and ψ of Euler angles (0°, θ, ψ) of the quartz substrate are in any one of regions surrounded by points A01 to A16, B01 to B16, C01 to C16, D01 to D13, E01 to E17, F01 to F11, G01 to G23, and H01 to H14 in the Tables 1 to 8:
  TABLE 1
   
  θ[°] ψ[°]
   
 
A01 100 146
A02 110 144
A03 120 144
A04 130 145
A05 136 147
A06 140 151
A07 140 156
A08 135 163
A09 130 166
A10 125 168
A11 120 168
A12 112 168
A13 110 166
A14 98 155
A15 97 150
A16 100 146
 
  TABLE 2
   
  θ[°] ψ[°]
   
 
B01 83 100
B02 86 95
B03 92 93
B04 100 92
B05 150 86
B06 180 81
B07 180 110
B08 151 126
B09 140 128
B10 130 129
B11 120 129
B12 105 127
B13 95 122
B14 85 110
B15 83 105
B16 83 100
 
  TABLE 3
   
  θ[°] ψ[°]
   
 
C01 104 60
C02 109 55
C03 118 52
C04 131 52
C05 146 54
C06 152 56
C07 161 60
C08 165 65
C09 160 70
C10 150 72
C11 140 73
C12 130 73
C13 120 72
C14 114 71
C15 105 66
C16 104 60
 
  TABLE 4
   
  θ[°] ψ[°]
   
 
  D01 95 31
  D02 100 36
  D03 180 50
  D04 180 19
  D05 150 12
  D06 140 11
  D07 130 10
  D08 120 10
  D09 111 12
  D10 106 14
  D11 102 18
  D12 98 23
  D13 95 31
   
  TABLE 5
   
  θ[°] ψ[°]
   
 
  E01 0 170
  E02 15 175
  E03 20 176
  E04 75 177
  E05 80 176
  E06 85 175
  E07 88 173
  E08 87 168
  E09 80 161
  E10 70 154
  E11 60 149
  E12 50 144
  E13 35 142
  E14 18 140
  E15 10 140
  E16 0 141
  E17 0 170
   
  TABLE 6
   
  θ[°] ψ[°]
   
 
  F01 23 121
  F02 27 125
  F03 45 128
  F04 50 128
  F05 55 125
  F06 55 122
  F07 50 116
  F08 45 113
  F09 35 113
  F10 30 115
  F11 23 121
   
  TABLE 7
   
  θ[°] ψ[°]
   
 
  G01 0 111
  G02 10 105
  G03 20 100
  G04 30 95
  G05 40 93
  G06 55 92
  G07 65 90
  G08 70 88
  G09 71 83
  G10 70 72
  G11 65 55
  G12 55 51
  G13 33 50
  G14 25 40
  G15 0 21
  G16 0 51
  G17 17 54
  G18 20 56
  G19 23 60
  G20 18 70
  G21 10 77
  G22 0 82
  G23 0 111
   
  TABLE 8
   
  θ[°] ψ[°]
   
 
  H01 22 11
  H02 23 17
  H03 33 25
  H04 45 30
  H05 52 31
  H06 60 30
  H07 69 26
  H08 73 21
  H09 72 15
  H10 66 11
  H11 46 6
  H12 33 6
  H13 26 8
  H14 22 11.