| US 7,488,952 B2 | ||
| Ion sources, systems and methods | ||
| Billy W. Ward, Merrimac, Mass. (US); John A. Notte, IV, Gloucester, Mass. (US); Louis S. Farkas, III, Durham, N.H. (US); Randall G. Percival, Raymond, N.H. (US); Raymond Hill, Rowley, Mass. (US); Lars Markwort, Muehltal (Germany); and Dirk Aderhold, Schwabsberg (Germany) | ||
| Assigned to ALIS Corporation, Peabody, Mass. (US) | ||
| Filed on Nov. 15, 2006, as Appl. No. 11/600,535. | ||
| Application 11/600535 is a continuation in part of application No. 10/966243, filed on Oct. 15, 2004, granted, now 7,368,727. | ||
| Application 11/600535 is a continuation in part of application No. 11/600535, filed on Nov. 15, 2006. | ||
| Application 11/600535 is a continuation in part of application No. 11/147102, filed on Jun. 07, 2005, granted, now 7,321,118. | ||
| Application 11/147102 is a continuation in part of application No. 11/146741, filed on Jun. 07, 2005, granted, now 7,414,243. | ||
| Application 11/146741 is a continuation in part of application No. 11/385136, filed on Mar. 20, 2006, abandoned. | ||
| Application 11/385136 is a continuation in part of application No. 11/385215, filed on Mar. 20, 2006. | ||
| Claims priority of provisional application 60/799203, filed on May 09, 2006. | ||
| Claims priority of provisional application 60/795806, filed on Apr. 28, 2006. | ||
| Claims priority of provisional application 60/784390, filed on Mar. 20, 2006. | ||
| Claims priority of provisional application 60/784388, filed on Mar. 20, 2006. | ||
| Claims priority of provisional application 60/784331, filed on Mar. 20, 2006. | ||
| Claims priority of provisional application 60/784500, filed on Mar. 20, 2006. | ||
| Claims priority of provisional application 60/741956, filed on Dec. 02, 2005. | ||
| Claims priority of provisional application 60/511726, filed on Oct. 16, 2003. | ||
| Prior Publication US 2007/0194226 A1, Aug. 23, 2007 | ||
| Int. Cl. H01J 27/26 (2006.01); H01J 27/02 (2006.01); H01J 49/10 (2006.01) | ||
| U.S. Cl. 250—423F [250/423 R; 250/424; 250/426; 250/492.21; 250/492.2] | 23 Claims |
| 1. A method, comprising:
generating an ion beam by interacting a gas with a gas field ion source;
inducing a voltage on a portion of the sample; and
detecting particles to determine voltage contrast information about the sample.
|