| US 7,488,936 B2 | ||
| TFT array inspecting apparatus | ||
| Ho Seok Choi, Suwon-si (Korea, Republic of); Vasily Lenyashine, Suwon-Si (Korea, Republic of); Hyeong Min Ahn, Yongin-Si (Korea, Republic of); Jeong Su Ha, Suwon-Si (Korea, Republic of); Sergey Antonov, Suwon-Si (Korea, Republic of); and Mi Jeong Song, Suwon-Si (Korea, Republic of) | ||
| Assigned to Samsung Electronics Co., Ltd., Suwon-si (Korea, Republic of) | ||
| Filed on Jul. 26, 2005, as Appl. No. 11/188,719. | ||
| Claims priority of application No. 10-2005-0006443 (KR), filed on Jan. 24, 2005. | ||
| Prior Publication US 2006/0163475 A1, Jul. 27, 2006 | ||
| Int. Cl. G21K 7/00 (2006.01) | ||
| U.S. Cl. 250—310 [250/397; 250/305; 250/306; 250/311; 324/770] | 22 Claims |
| 1. ATFT array inspecting apparatus comprising:
a vacuum chamber;
a stage disposed in the vacuum chamber so that a TFT array to be inspected is disposed on the stage;
an electron gun opposite to the stage in the vacuum chamber to generate an electron beam onto the TFT array;
an electron detecting unit to detect secondary electrons emitted from the TFT array in response to the electron beam of the
electron gun; and
at least one elevating unit to move the TFT array to a position between a level position and an inclined position having a
designated angle with the level position, the position varying according to a size of the TFT array.
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