| US 7,488,931 B2 | ||
| Optical zoom system for a light scanning electron microscope | ||
| Ralf Wolleschensky, Apolda (Germany); Joerg Steinert, Jena (Germany); Michael Goelles, Jena (Germany); and Kristina Uhlendorf, Jena (Germany) | ||
| Assigned to Carl Zeiss Jena GmbH, Jena (Germany) | ||
| Filed on Oct. 19, 2004, as Appl. No. 10/967,318. | ||
| Claims priority of application No. 10 2004 034 990 (DE), filed on Jul. 16, 2004. | ||
| Prior Publication US 2006/0011832 A1, Jan. 19, 2006 | ||
| Int. Cl. H01J 3/14 (2006.01); G02B 21/06 (2006.01) | ||
| U.S. Cl. 250—234 [250/216; 250/201.3; 359/368; 359/380] | 14 Claims |
| 1. An optical zoom system for use in a confocal light scanning electron microscope with linear scanning and having an illuminating
beam path and an objective for capturing an object to be imaged, the illuminating beam path having an illuminating beam path
entrance pupil, and the objective having an objective entrance pupil, the optical zoom system being adapted for positioning
in the illuminating beam path in front of the objective, the optical zoom system comprising:
optical zoom entrance and exit pupils;
means for adjusting the imaging length;
means for adjusting the image magnification;
means for adjusting the distance between the optical zoom entrance pupil and the optical zoom exit pupil in such a manner
that an axially varying pupil position of the entrance pupil of the objective can be equilibrated; and
means for maintaining the position of the objective entrance pupil while the means for adjusting the image magnification and
the means for adjusting the imaging length are being adjusted,
whereby the optical zoom system produces an intermediate image of the object and images the entrance pupil of the illuminating
beam path with at least one of a variable magnification and a variable imaging length into the exit pupil.
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