| US 7,488,924 B2 | ||
| Method for determining the focal position during imaging of a sample using an inclined position receiving device | ||
| Daniel Bublitz, Jena (Germany); Dieter Graefe, Jena (Germany); and Peter Westphal, Jena (Germany) | ||
| Assigned to Carl Zeiss MicroImaging GmbH, Jena (Germany) | ||
| Appl. No. 10/554,899 PCT Filed Apr. 27, 2004, PCT No. PCT/EP2004/004427 § 371(c)(1), (2), (4) Date Nov. 03, 2006, PCT Pub. No. WO2004/097493, PCT Pub. Date Nov. 11, 2004. |
||
| Claims priority of application No. 103 19 182 (DE), filed on Apr. 29, 2003. | ||
| Prior Publication US 2007/0102620 A1, May 10, 2007 | ||
| Int. Cl. G02B 7/04 (2006.01); G02B 27/40 (2006.01); G02B 27/64 (2006.01) | ||
| U.S. Cl. 250—201.3 [359/383; 250/201.7] | 12 Claims |
| 1. A method for determining a focus position when imaging a specimen, the method comprising:
imaging a field stop onto the specimen;
imaging an optical grid at least partially superimposed on the imaged field stop;
measuring intensity values I(xi) for light reflected by the specimen using a position-sensitive receiving device inclined relative to the field stop, each
intensity value I(xi) being assigned to a position in the receiving device;
determining position-related contrast values from the intensity values I(xi); and
determining a position of a contrast focus in the receiving device relative to a current focus position.
|