| US 7,488,560 B2 | ||
| Large pellicle | ||
| Yuichi Hamada, Gunma (Japan) | ||
| Assigned to Shin-Etsu Chemical Co., Ltd., Tokyo (Japan) | ||
| Filed on Nov. 23, 2005, as Appl. No. 11/285,304. | ||
| Claims priority of application No. 2004-339585 (JP), filed on Nov. 24, 2004. | ||
| Prior Publication US 2006/0110664 A1, May 25, 2006 | ||
| Int. Cl. G03F 1/00 (2006.01) | ||
| U.S. Cl. 430—5 | 12 Claims |
| 1. A pellicle comprising:
a pellicle frame that has an upper end face and a lower end face and is a quadrilateral having a side greater than 30 cm or
a circle having a diameter of greater than 30 cm;
a pellicle film stretched over the upper end face of the pellicle frame; and
a pressure-sensitive adhesion layer for affixing an exposure master plate to the pellicle frame, the pressure-sensitive adhesion
layer being provided on the lower end face of the pellicle frame;
the pressure-sensitive adhesion layer having a thickness of 400 μm or greater; and
the pressure-sensitive adhesion layer having a level of cohesive breaking strength such that the pressure-sensitive adhesion
layer does not undergo cohesive failure when peeled off from the pellicle frame or the exposure master plate.
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