| US 7,487,956 B2 | ||
| Method and apparatus to help promote contact of gas with vaporized material | ||
| John N. Gregg, Marble Falls, Tex. (US); Scott L. Battle, Cedar Park, Tex. (US); Jeffrey I. Banton, Burnet, Tex. (US); Donn K. Naito, Marble Falls, Tex. (US); and Ravi K. Laxman, San Jose, Calif. (US) | ||
| Assigned to Advanced Technology Materials, Inc., Danbury, Conn. (US) | ||
| Filed on Oct. 30, 2007, as Appl. No. 11/930,031. | ||
| Application 11/930031 is a continuation of application No. 10/858509, filed on Jun. 01, 2004, granted, now 7,300,038. | ||
| Application 10/858509 is a continuation in part of application No. 10/201518, filed on Jul. 23, 2002, granted, now 6,921,062. | ||
| Prior Publication US 2008/0057218 A1, Mar. 06, 2008 | ||
| Int. Cl. C23C 16/00 (2006.01) | ||
| U.S. Cl. 261—142 [261/74; 261/147; 261/DIG. 65; 118/726; 34/211; 34/380; 34/497] | 32 Claims |
| 1. A vaporizer comprising a vessel having (i) a thermally conductive vessel wall enclosing an interior volume, (ii) a gas inlet adapted to supply gas to the interior volume, (iii) a gas outlet adapted to receive gas carrying vaporized material from the interior volume, and (iv) a plurality of solid material holders disposed at different levels within the vessel, wherein each solid material holder has a solid material support surface and a thermally conductive holder sidewall extending above the solid material support surface, wherein each sidewall is adapted to be in substantial thermal contact with the vessel wall at a vessel operating temperature, wherein each solid material holder is adapted to hold a vaporizable material comprising a solid, and wherein the vessel is adapted to transfer heat through the vessel wall to the thermally conductive holder sidewall. |