US 7,486,705 B2
Femtosecond laser processing system with process parameters, controls and feedback
Lawrence Shah, San Ramon, Calif. (US); James M Bovatsek, San Jose, Calif. (US); Alan Y Arai, Fremont, Calif. (US); Tadashi Yamamoto, Fremont, Calif. (US); Rajesh S. Patel, Fremont, Calif. (US); and Donald J. Harter, Ann Arbor, Mich. (US)
Assigned to IMRA America, Inc., Ann Arbor, Mich. (US)
Filed on Mar. 31, 2004, as Appl. No. 10/813,269.
Prior Publication US 2005/0226287 A1, Oct. 13, 2005
Int. Cl. H01S 3/10 (2006.01)
U.S. Cl. 372—25  [372/6] 58 Claims
OG exemplary drawing
 
1. An apparatus for generating optical pulses, wherein each pulse may have individualized characteristics, the apparatus comprising:
laser means, for generating bursts of composite pulses, and for amplifying said composite pulses in a same fiber amplifier gain medium, wherein said laser means is configured so that each of said pulses are incident on said same fiber laser gain medium and emitted from the same fiber gain medium along a common optical path;
control means that controls the laser means; and
beam manipulation means for monitoring the pulsewidth characteristics of the pulses comprising the composite pulse bursts and generating feedback data for the control means for pulsewidth control, the beam manipulating means comprising: a telescopic optical device to control the size, shape, divergence or polarization of the laser pulses input into the beam manipulation means, and steering optics that control an impingement location of the laser pulses on the target substrate.