| US 7,486,403 B2 | ||
| Droplet shape measuring method and apparatus | ||
| Tatsuo Osaka, Isehara (Japan); Yoshikatsu Okada, Yokohama (Japan); Shigeru Yamada, Chofu (Japan); and Keiji Sakai, Tokyo (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Jul. 18, 2007, as Appl. No. 11/779,754. | ||
| Claims priority of application No. 2006-197591 (JP), filed on Jul. 20, 2006. | ||
| Prior Publication US 2008/0018909 A1, Jan. 24, 2008 | ||
| Int. Cl. G01B 11/02 (2006.01); G01N 21/00 (2006.01) | ||
| U.S. Cl. 356—496 [356/239.8] | 5 Claims |
| 1. A droplet shape measuring method comprising:
a first step of detecting a diffraction pattern produced by mutual interference between diffracted light generated when a
substrate is perpendicularly irradiated with laser light so that a droplet arranged on the substrate is irradiated with the
laser light; and
a second step of measuring a shape feature of the droplet from a refractive index of the droplet and the detected diffraction
pattern.
|