| US 7,485,612 B2 | ||
| Electronic parts cleaning solution | ||
| Masayuki Takashima, Tsukuba (Japan) | ||
| Assigned to Dongwoo Fine-Chem Co., Ltd., Jeonbuk (Korea, Republic of) | ||
| Filed on Jun. 30, 2005, as Appl. No. 11/174,061. | ||
| Claims priority of application No. 2004-193260 (JP), filed on Jun. 30, 2004. | ||
| Prior Publication US 2006/0008925 A1, Jan. 12, 2006 | ||
| Int. Cl. H01L 21/00 (2006.01) | ||
| U.S. Cl. 510—175 [510/500] | 13 Claims |
| 1. An electronic parts cleaning solution which is characterized in containing an anionic surfactant, hydroxide, metal corrosion
inhibitor, water, and a nonionic surfactant represented by formula (I) and/or a nonionic surfactant represented by formula
(II):
HO-((EO)x—(PO)y)z—H (I)
R-[((EO)a—(PO)b)c—H]m (II)
(EO is an oxyethylene group, and PO is an oxypropylene group. x and y, and a and b are positive numbers, which x/(x+y) and
a/(a+b) are 0.05 to 0.5 respectively, and z and c are positive integers. R is a monovalent group of
R1-O— (1)
H2N—R1-NH— (2)
H2N—R1-O— (3)
a divalent group of
 a trivalent group of
 a tetravalent group of
 R1 is a hydrocarbon group having C1-20, which may be substituted with hydroxy group and/or alkyl group, and m is an integer from 1 to 4 corresponding the valency
of R).
|